{"id":5255,"date":"2022-05-23T13:21:37","date_gmt":"2022-05-23T13:21:37","guid":{"rendered":"https:\/\/longchangchemical.com\/?p=5255"},"modified":"2026-04-28T10:42:00","modified_gmt":"2026-04-28T10:42:00","slug":"the-complete-guide-to-photoresist","status":"publish","type":"post","link":"https:\/\/longchangchemical.com\/zh\/the-complete-guide-to-photoresist\/","title":{"rendered":"2023 \u5149\u523b\u80f6\u5b8c\u5168\u6307\u5357"},"content":{"rendered":"<h1><strong>2023 \u5149\u523b\u80f6\u5b8c\u5168\u6307\u5357<\/strong><\/h1>\n<p><!-- lc-qa-start --><\/p>\n<p><strong>\u5feb\u901f\u56de\u7b54\uff1a<\/strong> \u5f15\u53d1\u5242\u7684\u9009\u62e9\u901a\u5e38\u53d6\u51b3\u4e8e\u706f\u7ba1\u7684\u5339\u914d\u5ea6\u3001\u56fa\u5316\u6df1\u5ea6\u3001\u9ec4\u53d8\u7a0b\u5ea6\uff0c\u4ee5\u53ca\u6700\u7ec8\u7684\u8584\u819c\u5728\u5b9e\u9645\u57fa\u6750\u4e0a\u662f\u5426\u4ecd\u7136\u80fd\u591f\u6b63\u5e38\u53d1\u6325\u6027\u80fd\u3002\u6700\u4f73\u7684\u914d\u65b9\u7ec4\u5408\u5f88\u5c11\u662f\u5355\u4e00\u6700\u4fbf\u5b9c\u7684\u7b49\u7ea7\u3002<\/p>\n<p><!-- lc-qa-end --><\/p>\n<p>For negative photoresist development, <a href=\"https:\/\/longchangchemical.com\/zh\/product\/photoinitiator-oxe-02-cas-478556-66-0\/\">\u5149\u5f15\u53d1\u5242 OXE-02<\/a> is a useful product reference when evaluating cure speed and imaging performance under UV exposure.<\/p>\n<p>\u5149\u523b\u80f6\u53c8\u79f0\u5149\u81f4\u6297\u8680\u5242\uff0c\u662f\u4e00\u79cd\u5149\u654f\u6df7\u5408\u6db2\u4f53\u3002\u5b83\u7531\u5149\u5f15\u53d1\u5242\u3001\u5149\u523b\u80f6\u6811\u8102\u3001\u5355\u4f53\u3001\u6eb6\u5242\u548c\u5176\u4ed6\u6dfb\u52a0\u5242\u7ec4\u6210\u3002\u5149\u523b\u80f6\u662f\u4e00\u79cd\u56fe\u5f62\u8f6c\u5370\u4ecb\u8d28\uff0c\u7ecf\u5149\u53cd\u5e94\u540e\u53ef\u5c06\u63a9\u819c\u7248\u56fe\u5f62\u8f6c\u5370\u5230\u4e0d\u540c\u6eb6\u89e3\u5ea6\u7684\u57fa\u5e95\u4e0a\u3002\u76ee\u524d\uff0c\u5149\u523b\u80f6\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5149\u7535\u4fe1\u606f\u4ea7\u4e1a\u4e2d\u7cbe\u7ec6\u56fe\u5f62\u7ebf\u6761\u7684\u5236\u4f5c\u3002\u5b83\u662f\u7535\u5b50\u5236\u9020\u9886\u57df\u7684\u5173\u952e\u6750\u6599\u4e4b\u4e00\u3002<br \/>\n\u6839\u636e\u5149\u7684\u6ce2\u957f\uff0c\u5149\u523b\u80f6\u53ef\u5206\u4e3a\u7d2b\u5916\u7ebf\uff08300-450nm\uff09\u5149\u523b\u80f6\u3001\u6df1\u7d2b\u5916\u7ebf\uff08160-280nm\uff09\u5149\u523b\u80f6\u3001\u6781\u7d2b\u5916\u7ebf\uff08EUV\uff0c13.5nm\uff09\u5149\u523b\u80f6\u3001\u7535\u5b50\u675f\u5149\u523b\u80f6\u3001\u79bb\u5b50\u675f\u5149\u523b\u80f6\u3001X \u5c04\u7ebf\u5149\u523b\u80f6\u7b49\u3002\u4e00\u822c\u6765\u8bf4\uff0c\u5728\u76f8\u540c\u7684\u5de5\u827a\u65b9\u6cd5\u4e0b\uff0c\u6ce2\u957f\u8d8a\u77ed\uff0c\u52a0\u5de5\u5206\u8fa8\u7387\u8d8a\u9ad8\u3002<br \/>\n\u6839\u636e\u5e94\u7528\u9886\u57df\u7684\u4e0d\u540c\uff0c\u5149\u523b\u80f6\u53ef\u5206\u4e3a\u5370\u5237\u7535\u8def\u677f\uff08PCB\uff09\u7528\u5149\u523b\u80f6\u3001\u6db2\u6676\u663e\u793a\u5668\uff08LCD\uff09\u7528\u5149\u523b\u80f6\u3001\u534a\u5bfc\u4f53\u7528\u5149\u523b\u80f6\u548c\u5176\u4ed6\u5e94\u7528\u5149\u523b\u80f6\u3002\u5370\u5237\u7535\u8def\u677f\u5149\u523b\u80f6\u7684\u6280\u672f\u58c1\u5792\u76f8\u5bf9\u5176\u4ed6\u4e24\u7c7b\u8f83\u4f4e\uff0c\u800c\u534a\u5bfc\u4f53\u5149\u523b\u80f6\u5219\u4ee3\u8868\u4e86\u5149\u523b\u80f6\u6700\u5148\u8fdb\u7684\u6280\u672f\u6c34\u5e73\u3002<br \/>\n\u6309\u5316\u5b66\u7ed3\u6784\u5212\u5206\uff0c\u5149\u523b\u80f6\u53ef\u5206\u4e3a\u5149\u805a\u5408\u578b\u3001\u5149\u89e3\u578b\u3001\u5149\u4ea4\u8054\u578b\u548c\u5316\u5b66\u5938\u5f20\u578b\u3002\u5149\u805a\u5408\u578b\u5149\u523b\u80f6\u4f7f\u7528\u70ef\u70c3\u5355\u4f53\uff0c\u5728\u5149\u7684\u4f5c\u7528\u4e0b\u4ea7\u751f\u81ea\u7531\u57fa\uff0c\u8fdb\u4e00\u6b65\u5f15\u53d1\u5355\u4f53\u805a\u5408\uff0c\u6700\u7ec8\u751f\u6210\u805a\u5408\u7269\u3002\u5149\u89e3\u5149\u523b\u80f6\u4ee5\u91cd\u6c2e\u918c\uff08DQN\uff09\u4e3a\u5149\u654f\u5242\uff0c\u7ecf\u5149\u7167\u540e\u53d1\u751f\u5149\u89e3\u53cd\u5e94\uff0c\u53ef\u5236\u6210\u6b63\u6027\u5149\u523b\u80f6\uff1b\u5149\u4ea4\u8054\u5149\u523b\u80f6\u4ee5\u805a\u6708\u6842\u9178\u4e59\u70ef\u916f\u4e3a\u5149\u654f\u6750\u6599\uff0c\u5728\u5149\u7684\u4f5c\u7528\u4e0b\u5f62\u6210\u4e0d\u6eb6\u4e8e\u6c34\u7684\u7f51\u72b6\u7ed3\u6784\uff0c\u8010\u8150\u8680\uff0c\u53ef\u5236\u6210\u8d1f\u6027\u5149\u523b\u80f6\u3002\u5728\u534a\u5bfc\u4f53\u96c6\u6210\u7535\u8def\u5149\u523b\u6280\u672f\u4e2d\u4f7f\u7528\u6df1\u7d2b\u5916\uff08DUV\uff09\u5149\u6e90\u540e\uff0c\u5316\u5b66\u653e\u5927\uff08CAR\uff09\u6280\u672f\u9010\u6e10\u6210\u4e3a\u884c\u4e1a\u5e94\u7528\u7684\u4e3b\u6d41\u3002\u5728 CAR \u6280\u672f\u4e2d\uff0c\u6811\u8102\u662f\u4e00\u79cd\u53d7\u5316\u5b66\u57fa\u56e2\u4fdd\u62a4\u7684\u805a\u4e59\u70ef\uff0c\u56e0\u6b64\u5f88\u96be\u6eb6\u89e3\u3002\u5316\u5b66\u653e\u5927\u5149\u523b\u80f6\u4f7f\u7528\u5149\u9178\uff08PAG\uff09\u4f5c\u4e3a\u5149\u5f15\u53d1\u5242\u3002\u5149\u523b\u80f6\u66dd\u5149\u65f6\uff0c\u66dd\u5149\u533a\u57df\u7684 PAG \u4f1a\u4ea7\u751f\u4e00\u79cd\u9178\u3002\u8fd9\u79cd\u9178\u5728\u540e\u52a0\u70ed\u70d8\u70e4\u8fc7\u7a0b\u4e2d\u8d77\u50ac\u5316\u5242\u4f5c\u7528\uff0c\u4f1a\u53bb\u9664\u6811\u8102\u7684\u4fdd\u62a4\u57fa\u56e2\uff0c\u4f7f\u6811\u8102\u6613\u4e8e\u6eb6\u89e3\u3002\u5316\u5b66\u653e\u5927\u5149\u523b\u80f6\u6bd4 DQN \u5149\u523b\u80f6\u5feb 10 \u500d\uff0c\u5bf9\u6df1\u7d2b\u5916\u5149\u6e90\u5177\u6709\u826f\u597d\u7684\u5149\u5b66\u7075\u654f\u5ea6\u3001\u9ad8\u5bf9\u6bd4\u5ea6\u548c\u9ad8\u5206\u8fa8\u7387\u3002<br \/>\n\u5149\u523b\u80f6\u662f\u96c6\u6210\u7535\u8def\u5236\u9020\u7684\u91cd\u8981\u6750\u6599\uff1a\u5149\u523b\u80f6\u7684\u8d28\u91cf\u548c\u6027\u80fd\u662f\u5f71\u54cd\u96c6\u6210\u7535\u8def\u6027\u80fd\u3001\u826f\u7387\u548c\u53ef\u9760\u6027\u7684\u5173\u952e\u56e0\u7d20\uff0c\u5149\u523b\u5de5\u827a\u6210\u672c\u7ea6\u5360\u6574\u4e2a\u82af\u7247\u5236\u9020\u5de5\u827a\u768435%\uff0c\u8017\u65f6\u7ea6\u5360\u6574\u4e2a\u82af\u7247\u5de5\u827a\u768440-50%\uff0c\u5149\u523b\u80f6\u6210\u672c\u7ea6\u5360\u96c6\u6210\u7535\u8def\u5236\u9020\u6750\u6599\u603b\u6210\u672c\u76844%\uff0c\u5e02\u573a\u5de8\u5927\u3002\u636e\u7b2c\u4e09\u65b9\u673a\u6784\u667a\u7814\u54a8\u8be2\u9884\u8ba1\uff0c2019\u5e74\u5168\u7403\u5149\u523b\u80f6\u5e02\u573a\u89c4\u6a21\u5c06\u63a5\u8fd110TP4T9\u4ebf\u5143\uff0c\u81ea2010\u5e74\u81f3\u4eca\u7684\u5e74\u590d\u5408\u589e\u957f\u7387\u7ea6\u4e3a5.4%\u3002\u9884\u8ba1\u672a\u6765\u4e09\u5e74\uff0c\u8be5\u5e02\u573a\u4ecd\u5c06\u4ee5\u5e74\u5747 5% \u7684\u901f\u5ea6\u589e\u957f\uff0c\u5230 2022 \u5e74\uff0c\u5168\u7403\u5149\u523b\u80f6\u5e02\u573a\u89c4\u6a21\u5c06\u8d85\u8fc7 100 \u4ebf\u7f8e\u5143\u3002\u5149\u523b\u80f6\u884c\u4e1a\u5177\u6709\u5f88\u9ad8\u7684\u884c\u4e1a\u58c1\u5792\uff0c\u56e0\u6b64\u8be5\u884c\u4e1a\u5728\u5168\u7403\u8303\u56f4\u5185\u5904\u4e8e\u5be1\u5934\u5784\u65ad\u5c40\u9762\u3002\u5149\u523b\u80f6\u884c\u4e1a\u591a\u5e74\u6765\u4e00\u76f4\u88ab\u65e5\u672c\u548c\u7f8e\u56fd\u7684\u4e13\u4e1a\u516c\u53f8\u6240\u5784\u65ad\u3002\u76ee\u524d\uff0c\u524d\u4e94\u5927\u5236\u9020\u5546\u5360\u636e\u4e86\u5168\u7403\u5149\u523b\u80f6\u5e02\u573a\u7684 87%\uff0c\u884c\u4e1a\u96c6\u4e2d\u5ea6\u8f83\u9ad8\u3002\u5176\u4e2d\uff0c\u65e5\u672c JSR\u3001\u4e1c\u4eac E&amp;C\u3001\u65e5\u672c\u4fe1\u8d8a\u548c\u5bcc\u58eb\u7535\u5b50\u6750\u6599\u7684\u5e02\u573a\u4efd\u989d\u5408\u8ba1\u8fbe\u5230 72%\u3002\u800c\u9ad8\u5206\u8fa8\u7387 KrF \u548c ArF \u534a\u5bfc\u4f53\u5149\u523b\u80f6\u7684\u6838\u5fc3\u6280\u672f\u57fa\u672c\u88ab\u65e5\u672c\u548c\u7f8e\u56fd\u516c\u53f8\u5784\u65ad\uff0c\u5927\u90e8\u5206\u4ea7\u54c1\u6765\u81ea\u65e5\u672c\u548c\u7f8e\u56fd\u516c\u53f8\uff0c\u5982\u675c\u90a6\u3001JSR \u516c\u53f8\u3001\u4fe1\u8d8a\u5316\u5b66\u3001\u4e1c\u4eac\u5316\u5de5\u3001\u5bcc\u58eb\u80f6\u7247\u3001\u97e9\u56fd\u4e1c\u8fdb\u7b49\u3002\u4ece\u6574\u4e2a\u5149\u523b\u80f6\u5e02\u573a\u683c\u5c40\u6765\u770b\uff0c\u65e5\u672c\u662f\u5149\u523b\u80f6\u4ea7\u4e1a\u7684\u5de8\u5927\u805a\u96c6\u5730\u3002\u76ee\u524d\uff0c\u4e2d\u56fd\u5927\u9646\u7684\u7535\u5b50\u6750\u6599\u5c24\u5176\u662f\u5149\u523b\u80f6\u5bf9\u5916\u4f9d\u5b58\u5ea6\u8f83\u9ad8\u3002\u56e0\u6b64\uff0c\u534a\u5bfc\u4f53\u6750\u6599\u56fd\u4ea7\u5316\u66ff\u4ee3\u662f\u5fc5\u7136\u8d8b\u52bf\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><!-- lc-commercial-start --><\/p>\n<h2>\u5149\u5f15\u53d1\u5242\u76f8\u5173\u9879\u76ee\u7684\u5b9e\u7528\u9009\u62e9\u8def\u7ebf<\/h2>\n<p>\u5f53\u6280\u672f\u4e70\u5bb6\u6216\u914d\u65b9\u5e08\u7b5b\u9009\u5149\u5f15\u53d1\u5242\u65f6\uff0c\u6700\u6709\u7528\u7684\u51b3\u7b56\u6846\u67b6\u901a\u5e38\u662f\u56fa\u5316\u8d28\u91cf\u52a0\u4e0a\u5e94\u7528\u5951\u5408\u5ea6\uff1a\u54ea\u79cd\u5305\u88c5\u80fd\u591f\u53ef\u9760\u56fa\u5316\uff0c\u4fdd\u6301\u53ef\u63a5\u53d7\u7684\u5916\u89c2\uff0c\u5e76\u4e14\u5728\u5b9e\u9645\u5de5\u827a\u7684\u706f\u5149\u3001\u819c\u539a\u548c\u57fa\u6750\u6761\u4ef6\u4e0b\u4ecd\u7136\u6709\u6548\u3002<\/p>\n<ul>\n<li><strong>\u5148\u5c06\u5305\u88c5\u76d2\u4e0e\u706f\u5339\u914d\uff1a<\/strong> \u6c5e\u706f\u3001\u7d2b\u5916LED\u548c\u53ef\u89c1\u5149\u7cfb\u7edf\u53ef\u80fd\u5bf9\u540c\u4e00\u79cd\u5149\u5f15\u53d1\u5242\u7684\u6392\u5e8f\u5dee\u5f02\u5f88\u5927\u3002<\/li>\n<li><strong>\u5206\u522b\u68c0\u67e5\u6df1\u5ea6\u56fa\u5316\u548c\u8868\u9762\u56fa\u5316\uff1a<\/strong> \u8868\u9762\u611f\u89c9\u5e72\u6da9\u7684\u7535\u5f71\uff0c\u5185\u91cc\u53ef\u80fd\u4ecd\u7136\u5f88\u865a\u5f31\u3002<\/li>\n<li><strong>\u5e73\u8861\u53d1\u9ec4\u4e0e\u53cd\u5e94\u6027\uff1a<\/strong> \u6700\u5f3a\u7684\u6df1\u5ea6\u56fa\u5316\u8def\u7ebf\u5e76\u975e\u603b\u662f\u6700\u4f73\u7684\u5546\u4e1a\u9009\u62e9\uff0c\u5982\u679c\u989c\u8272\u6216\u8fc1\u79fb\u98ce\u9669\u53d8\u5f97\u4e0d\u53ef\u63a5\u53d7\u3002<\/li>\n<li><strong>\u5c06\u6700\u7ec8\u516c\u5f0f\u4f5c\u4e3a\u57fa\u51c6\uff1a<\/strong> \u989c\u6599\u542b\u91cf\u3001\u5355\u4f53\u5305\u88c5\u548c\u6210\u819c\u539a\u5ea6\u90fd\u4f1a\u6539\u53d8\u540c\u4e00\u79cd\u5f15\u53d1\u5242\u7684\u8868\u89c2\u6392\u540d\u3002<\/li>\n<\/ul>\n<h3>\u63a8\u8350\u7684\u4ea7\u54c1\u53c2\u8003<\/h3>\n<ul>\n<li><strong><a href=\"https:\/\/longchangchemical.com\/zh\/product\/photoinitiator-tpo-l-cas-84434-11-7\/\">CHLUMINIT TPO-L<\/a>:<\/strong> \u9002\u7528\u4e8e LED \u578b\u7d2b\u5916\u7cfb\u7edf\u7684\u5f3a\u6548\u4f4e\u9ec4\u53d8\u53c2\u8003\u6807\u51c6\u3002<\/li>\n<li><strong><a href=\"https:\/\/longchangchemical.com\/zh\/product\/photoinitiator-819-irgacure-819-cas-162881-26-7\/\">CHLUMINIT 819<\/a>:<\/strong> \u5f53\u914d\u65b9\u9700\u8981\u66f4\u5f3a\u7684\u5438\u6536\u548c\u66f4\u6df1\u5c42\u7684\u56fa\u5316\u652f\u6301\u65f6\u5f88\u6709\u7528\u3002<\/li>\n<li><strong><a href=\"https:\/\/longchangchemical.com\/zh\/product\/photoinitiator-184-cas-947-19-3\/\">CHLUMINIT 184<\/a>:<\/strong> 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